Silicon micromachined waveguides for millimeter-wave and submillimeter-wave frequencies
نویسندگان
چکیده
منابع مشابه
Millimeter and Submillimeter Wave Applications
Many applications of millimeter and submillimeter wave systems have been suggested in the literature but, in general, they have not yet beea employed in practice to any significant degree. This report discusses the advantages and limitations of this frequency region and reviews the potential applications under the categories of radar, communications, radiometry and instrumentation. One of the p...
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The high cost of fabricating waveguide components is one of the primary factors limiting the development of terahertz technology. This paper reviews the development of an inexpensive micromachining technology that is suitable for the frequency range from 500 GHz through 5 THz. Our first effort was a 585 GHz direct detector that allowed us to measure the beam patterns of our new micromachined ho...
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This paper gives an overview on recent achievements in micromachined technology for millimeter and submillimeter-wave applications, from 130 to 750 GHz. The micromachined components presented include the first ever submillimeter-wave MEMS devices, namely a 500600 GHz 3.3 bit phase shifter and a 500-750 GHz waveguide MEMS switch, a 0.02 dB/mm loss waveguide technology for the 220-330 GHz band wi...
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Aalto University, P.O. Box 11000, FI-00076 Aalto www.aalto.fi Author Vasilii Semkin Name of the doctoral dissertation Reconfigurable antennas and radio wave propagation at millimeter-wave frequencies Publisher School of Electrical Engineering Unit Department of Radio Science and Engineering Series Aalto University publication series DOCTORAL DISSERTATIONS 151/2016 Field of research Radio Engine...
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We have developed a process for the fabrication of highquality Nb/AlOx/Nb tunnel junctions with small area and high current densities for the heterodyne mixers at millimeter and submillimeter wavelengths. Their dc I-V curves are numerically studied, including the broadening of quasiparticle density of states resulting from the existence of an imaginary part of the gap energy of Nb. We have foun...
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ژورنال
عنوان ژورنال: IEEE Microwave and Guided Wave Letters
سال: 1993
ISSN: 1051-8207
DOI: 10.1109/75.205665